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- Suitable for most major brand microscopes.
- 1um or better repeatability
- Quiet and reliable
- Wide range of sample holders.
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H112 stage ´Â ±¤¹üÀ§ÇÑ semiconductor wafer, photo masks, flat panel display, printed circuit board µî¿¡ ÀûÇÕÇÑ stageÀÔ´Ï´Ù. ¶ÇÇÑ H112´Â 250 X 250mm ÀÇ Åõ°ú ¿µ¿ªÀÇ Àû¿ë¿¡ »ç¿ëµÉ ¼ö ÀÖ½À´Ï´Ù.
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Travel range |
305 mm X 305 mm |
Minimum step size |
0.04 um |
Max load |
25 kg |
Max Speed |
60 mm/s |
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H112 stage °í¹èÀ²¿¡¼ ºÎµå·¯¿î ¿òÁ÷ÀÓÀ» À§ÇÑ 2mm pitchÀÇ ball screw option°ú ºü¸¥ À̵¿À» À§ÇÑ 5mm ÀÇ ball screw option À» ¼±ÅÃÇÒ ¼ö ÀÖ½À´Ï´Ù. Linear , Rotary encoder´Â ¸ðµç H112 stage¿¡ ¼³Ä¡°¡ °¡´ÉÇÕ´Ï´Ù.
Ball screws |
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2mm |
5mm |
Motors |
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200 step |
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Rotary enconders |
2000£ª Counts per revoltion |
4000 Counts per revolution |
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Linear Encoders |
0.5um |
0.1um£ª |
0.05um |
* Standard option
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